The influence of different RuO2 crystallite sizes was investigated by secondary ion mass spectrometry(SIMS) on the oxide deposited on various support materials (Ni, Ti, Al2O3, oxidized Si(100)). In order toexamine the effect of an oxidic environment on the film structure, RuO2 20%-TiO2 80% at. mixed oxide wasdeposited on Ti. The polycrystalline coatings were prepared by heating the Ru (and Ti)-containing solutiondropped on the supports. RuO2 nanocrystalline coatings were grown by chemical vapor deposition (CVD)from Ru(COD)(3-allyl)2.2 The identification of mixed oxide clusters showed the higher reactivity of Ni andAl2O3 over the other substrates. Diffusion and migration characteristics were observed to be influenced bythe nature of the support. The results are complementary to those of a previous SIMS investigation.
Secondary ion mass spectrometric investigation on ruthenium oxide systems: a comparison between poly- and nanocrystalline deposits
S Barison;D Barreca;S Daolio;M Fabrizio;C Piccirillo
2000
Abstract
The influence of different RuO2 crystallite sizes was investigated by secondary ion mass spectrometry(SIMS) on the oxide deposited on various support materials (Ni, Ti, Al2O3, oxidized Si(100)). In order toexamine the effect of an oxidic environment on the film structure, RuO2 20%-TiO2 80% at. mixed oxide wasdeposited on Ti. The polycrystalline coatings were prepared by heating the Ru (and Ti)-containing solutiondropped on the supports. RuO2 nanocrystalline coatings were grown by chemical vapor deposition (CVD)from Ru(COD)(3-allyl)2.2 The identification of mixed oxide clusters showed the higher reactivity of Ni andAl2O3 over the other substrates. Diffusion and migration characteristics were observed to be influenced bythe nature of the support. The results are complementary to those of a previous SIMS investigation.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
