This paper presents the results of the electrical characterization of a silicon Low Voltage Trench Gate charged-coupled Power MOSFET under external uniaxial mechanical stress. The stress was imposed by a 3 Point Bending system during electrical measurement of the oxide leakage current.
Electrical characterization of gate oxide current in a silicon power MOS subjected to uniaxial mechanical stress
Sciuto Antonella;D'Arrigo Giuseppe
2020
Abstract
This paper presents the results of the electrical characterization of a silicon Low Voltage Trench Gate charged-coupled Power MOSFET under external uniaxial mechanical stress. The stress was imposed by a 3 Point Bending system during electrical measurement of the oxide leakage current.File in questo prodotto:
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