ARDUCA, ELISA
ARDUCA, ELISA
Istituto per la Microelettronica e Microsistemi - IMM
Doping of silicon with phosphorus end-terminated polymers: source characterization and dopant diffusion in SiO2
2021 Perego, Michele; Seguini, Gabriele; Mascheroni, Edoardo; Arduca, Elisa; Gianotti, Valentina; Laus, Michele
Engineering of the spin on dopant process on silicon on insulator substrate
2021 Barri, Chiara; Mafakheri, Erfan; Fagiani, Luca; Tavani, Giulio; Barzaghi, Andrea; Chrastina, Daniel; Fedorov, Alexey; Frigerio, Jacopo; Lodari, Mario; Scotognella, Francesco; Arduca, Elisa; Abbarchi, Marco; Perego, Michele; Bollani, Monica
Control of Doping Level in Semiconductors via Self-Limited Grafting of Phosphorus End-Terminated Polymers
2018 Perego, Michele; Seguini, Gabriele; Arduca, Elisa; Nomellini, Andrea; Sparnacci, Katia; Antonioli, Diego; Gianotti, Valentina; Laus, Michele
Electronic band structures of undoped and P-doped Si nanocrystals embedded in SiO2
2018 Arduca, E; Seguini, G; Martella, C; Lamperti, A; Napolitani, E; De Salvador, D; Nicotra, G; Scuderi, M; Spinella, C; Perego, M
Evolution of shape, size, and areal density of a single plane of Si nanocrystals embedded in SiO2 matrix studied by atom probe tomography
2016 Han, Bin; Shimizu, Yasuo; Seguini, Gabriele; Arduca, Elisa; Castro, Celia; Ben Assayag, Gerard; Inoue, Koji; Nagai, Yasuyoshi; SchammChardon, Sylvie; Perego, Michele
Modeling of phosphorus diffusion in silicon oxide and incorporation in silicon nanocrystals
2016 Mastromatteo, Massimo; De Salvador, Davide; Napolitani, Enrico; Arduca, Elisa; Seguini, Gabriele; Frascaroli, Jacopo; Perego, Michele; Nicotra, Giuseppe; Spinella, Corrado; Lenardi, Cristina; Carnera, Alberto
Synthesis and characterization of P delta-layer in SiO2 by monolayer doping
2016 Arduca, Elisa; Mastromatteo, Massimo; De Salvador, Davide; Seguini, Gabriele; Lenardi, Cristina; Napolitani, Enrico; Perego, Michele
Thermodynamic stability of high phosphorus concentration in silicon nanostructures
2015 Perego, Michele; Seguini, Gabriele; Arduca, Elisa; Frascaroli, Jacopo; DE SALVADOR, Davide; Mastromatteo, Massimo; Carnera, Alberto; Nicotra, Giuseppe; Scuderi, Mario; Spinella, Corrado; Impellizzeri, Giuliana; Lenardi, Cristina; Napolitani, Enrico
Quantification of phosphorus diffusion and incorporation in silicon nanocrystals embedded in silicon oxide
2014 Mastromatteo, M.; Arduca, E.; Napolitani, E.; Nicotra, G.; De Salvador, D.; Bacci, L.; Frascaroli, J.; Seguini, G.; Scuderi, M.; Impellizzeri, G.; Spinella, C.; Perego, M.; Carnera, A.
| Titolo | Data di pubblicazione | Autore(i) | File |
|---|---|---|---|
| Doping of silicon with phosphorus end-terminated polymers: source characterization and dopant diffusion in SiO2 | 1-gen-2021 | Perego, Michele; Seguini, Gabriele; Mascheroni, Edoardo; Arduca, Elisa; Gianotti, Valentina; Laus, Michele | |
| Engineering of the spin on dopant process on silicon on insulator substrate | 1-gen-2021 | Barri, Chiara; Mafakheri, Erfan; Fagiani, Luca; Tavani, Giulio; Barzaghi, Andrea; Chrastina, Daniel; Fedorov, Alexey; Frigerio, Jacopo; Lodari, Mario; Scotognella, Francesco; Arduca, Elisa; Abbarchi, Marco; Perego, Michele; Bollani, Monica | |
| Control of Doping Level in Semiconductors via Self-Limited Grafting of Phosphorus End-Terminated Polymers | 1-gen-2018 | Perego, Michele; Seguini, Gabriele; Arduca, Elisa; Nomellini, Andrea; Sparnacci, Katia; Antonioli, Diego; Gianotti, Valentina; Laus, Michele | |
| Electronic band structures of undoped and P-doped Si nanocrystals embedded in SiO2 | 1-gen-2018 | Arduca, E; Seguini, G; Martella, C; Lamperti, A; Napolitani, E; De Salvador, D; Nicotra, G; Scuderi, M; Spinella, C; Perego, M | |
| Evolution of shape, size, and areal density of a single plane of Si nanocrystals embedded in SiO2 matrix studied by atom probe tomography | 1-gen-2016 | Han, Bin; Shimizu, Yasuo; Seguini, Gabriele; Arduca, Elisa; Castro, Celia; Ben Assayag, Gerard; Inoue, Koji; Nagai, Yasuyoshi; SchammChardon, Sylvie; Perego, Michele | |
| Modeling of phosphorus diffusion in silicon oxide and incorporation in silicon nanocrystals | 1-gen-2016 | Mastromatteo, Massimo; De Salvador, Davide; Napolitani, Enrico; Arduca, Elisa; Seguini, Gabriele; Frascaroli, Jacopo; Perego, Michele; Nicotra, Giuseppe; Spinella, Corrado; Lenardi, Cristina; Carnera, Alberto | |
| Synthesis and characterization of P delta-layer in SiO2 by monolayer doping | 1-gen-2016 | Arduca, Elisa; Mastromatteo, Massimo; De Salvador, Davide; Seguini, Gabriele; Lenardi, Cristina; Napolitani, Enrico; Perego, Michele | |
| Thermodynamic stability of high phosphorus concentration in silicon nanostructures | 1-gen-2015 | Perego, Michele; Seguini, Gabriele; Arduca, Elisa; Frascaroli, Jacopo; DE SALVADOR, Davide; Mastromatteo, Massimo; Carnera, Alberto; Nicotra, Giuseppe; Scuderi, Mario; Spinella, Corrado; Impellizzeri, Giuliana; Lenardi, Cristina; Napolitani, Enrico | |
| Quantification of phosphorus diffusion and incorporation in silicon nanocrystals embedded in silicon oxide | 1-gen-2014 | Mastromatteo, M.; Arduca, E.; Napolitani, E.; Nicotra, G.; De Salvador, D.; Bacci, L.; Frascaroli, J.; Seguini, G.; Scuderi, M.; Impellizzeri, G.; Spinella, C.; Perego, M.; Carnera, A. |