In order to determine the maximum sustainable gradients in normal conducting RF powered particle beam accelerators operating at 11.424 GHz with extremely low probability of RF breakdown, we are investigating the possibility of using the Mo coating method. Molybdenum films were grown by rf magnetron sputtering technique on glass and sapphire substrates at room temperature. The sputtering parameters were optimized specifically addressing the growth of oxygen free Mo layers. An almost oxygen free content in the thin Mo films has been checked by Rutherford Back Scattering (RBS) technique. The chemical properties characterization of the coatings film have been carried out at Diamond Light Source (UK) with the XANES (X-ray Absorption Near Edge Structure) technique. In this paper a procedure to obtain a very low Mo films oxygen contamination is described. Some hints about other applications of the molybdenum coatings are also presented.
A procedure to obtain a very low Mo films with oxygen contamination
C Caliendo;
2012
Abstract
In order to determine the maximum sustainable gradients in normal conducting RF powered particle beam accelerators operating at 11.424 GHz with extremely low probability of RF breakdown, we are investigating the possibility of using the Mo coating method. Molybdenum films were grown by rf magnetron sputtering technique on glass and sapphire substrates at room temperature. The sputtering parameters were optimized specifically addressing the growth of oxygen free Mo layers. An almost oxygen free content in the thin Mo films has been checked by Rutherford Back Scattering (RBS) technique. The chemical properties characterization of the coatings film have been carried out at Diamond Light Source (UK) with the XANES (X-ray Absorption Near Edge Structure) technique. In this paper a procedure to obtain a very low Mo films oxygen contamination is described. Some hints about other applications of the molybdenum coatings are also presented.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
