This document is the reference usage procedure for Reactive Ion Etching (RIE) facility, and contains also vacuum and lines sketches. It does NOT substitute the documentation and the training, but it’s intended as a quick reference for day-to-day operation.
RIE Standard Operationg Procedure
Daniele Ercolani
2024
Abstract
This document is the reference usage procedure for Reactive Ion Etching (RIE) facility, and contains also vacuum and lines sketches. It does NOT substitute the documentation and the training, but it’s intended as a quick reference for day-to-day operation.File in questo prodotto:
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RIE SOP v.1.1.pdf
accesso aperto
Descrizione: Procedura operativa standard RIE @ FNF di IOM-CNR
Tipologia:
Versione Editoriale (PDF)
Licenza:
Creative commons
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464.69 kB
Formato
Adobe PDF
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464.69 kB | Adobe PDF | Visualizza/Apri |
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