PEREGO, MICHELE
PEREGO, MICHELE
Istituto per la Microelettronica e Microsistemi - IMM - Sede Secondaria Agrate Brianza
Al2O3 growth in PMMA thin films by sequential infiltration synthesis: in situ thickness evolution and mass uptake investigation
2024 Perego, M.; Seguini, G.; Wiemer, C.; Caligiore, F. E.; Cianci, E.
Donor incomplete ionization and mobility enhancement in ultra-thin silicon-on-insulator films doped by phosphorus end-terminated polymers
2024 Pulici, Andrea; Kuschlan, Stefano; Seguini, Gabriele; De Michielis, Marco; Chiarcos, Riccardo; Laus, Michele; Fanciulli, Marco; Perego, Michele
Fabrication of nitrogen-hyperdoped silicon by high-pressure gas immersion excimer laser doping
2024 Barkby, Josh W.; Moro, Fabrizio; Perego, Michele; Taglietti, Fabiana; Lidorikis, Elefterios; Kalfagiannis, Nikolaos; Koutsogeorgis, Demosthenes C.; Fanciulli, Marco
Polymeric precision doping as an emerging technology for the downscaling of microelectronic devices: State of the art
2024 Chiarcos, R.; Laus, M.; Perego, M.
Polystyrene Brush Evolution by Grafting to Reaction on Deglazed and Not-Deglazed Silicon Substrates
2024 Ivaldi, C.; Ospina Guarin, V. M.; Antonioli, D.; Zuccheri, G.; Sparnacci, K.; Gianotti, V.; Perego, M.; Chiarcos, R.; Laus, M.
Sequential Infiltration Synthesis of Al2O3 in PMMA Thin Films: Temperature Investigation by Operando Spectroscopic Ellipsometry
2024 Motta, A.; Seguini, G.; Wiemer, C.; Perego, M.
Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers
2023 Pulici, Andrea; Kuschlan, Stefano; Seguini, Gabriele; Taglietti, Fabiana; Fanciulli, Marco; Chiarcos, Riccardo; Laus, Michele; Perego, Michele
Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film
2023 Kuschlan, Stefano; Chiarcos, Riccardo; Laus, Michele; Perezmurano, Francesc; Llobet, Jordi; Fernandezregulez, Marta; Bonafos, Caroline; Perego, Michele; Seguini, Gabriele; DE MICHIELIS, Marco; Tallarida, Graziella
Phosphorus activation in silicon: To deglaze or not to deglaze, that is the question
2023 Barin, Gianluca; Seguini, Gabriele; Chiarcos, Riccardo; Ospina, Viviana Maria; Laus, Michele; Lenardi, Cristina; Perego, Michele
Plasma-Assisted Atomic Layer Deposition of IrO2 for Neuroelectronics
2023 Di Palma, Valerio; Pianalto, Andrea; Perego, Michele; Tallarida, Graziella; Codegoni, Davide; Fanciulli, Marco
Polymer Brushes by Grafting to Reaction in Melt: New Insights into the Mechanism
2023 Chiarcos, R.; Perego, M.; Laus, M.
Al2O3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication
2022 Seguini, Gabriele; Motta, Alessia; Bigatti, Marco; Caligiore Federica, E; Rademaker, Guido; Gharbi, Ahmed; Tiron, Raluca; Tallarida, Graziella; Perego, Michele; Cianci, Elena
Brush Layers of Bioinspired Polypeptoids for Deterministic Doping of Semiconductors
2022 Ospina, V. M.; Chiarcos, R.; Antonioli, D.; Gianotti, V.; Laus, M.; Kuschlan, S.; Wiemer, C.; Perego, M.
Characterization of biodegradable polybutylene succinate modified by sequential infiltration of Al2O3
2022 Pulvirenti, Alfio; Boccia, ANTONELLA CATERINA; Consonni, Roberto; Motta, Alessia; Perego, Michele; Cerruti, Pierfrancesco; Wiemer, Claudia; Sparvoli, Francesca
Improving HfO2-Based Resistive Switching Devices by Inserting a TaOxThin Film via Engineered In Situ Oxidation
2022 Wang, T.; Brivio, S.; Cianci, E.; Wiemer, C.; Perego, M.; Spiga, S.; Lanza, M.
Influence of spin casting solvent on the self-assembly of silicon-containing block copolymer thin films via high temperature thermal treatment
2022 Giammaria, T. J.; Laus, M.; Chiarcos, R.; Ober, C. K.; Seguini, G.; Perego, M.
Sequential Infiltration Synthesis of Al2O3in Biodegradable Polybutylene Succinate: Characterization of the Infiltration Mechanism
2022 Motta, Alessia; Seguini, Gabriele; Perego, Michele; Consonni, Roberto; Boccia, ANTONELLA CATERINA; Ambrosio, Gina; Baratto, Camilla; Cerruti, Pierfrancesco; Lavorgna, Marino; Tagliabue, Stefano; Wiemer, Claudia
Short vs. long chains competition during “grafting to” process from melt
2022 Chiarcos, R.; Antonioli, D.; Gianotti, V.; Laus, M.; Munao, G.; Milano, G.; De Nicola, A.; Perego, M.
Study of recrystallization and activation processes in thin and highly doped silicon-on-insulator layers by nanosecond laser thermal annealing
2022 Chery, N.; Zhang, M.; Monflier, R.; Mallet, N.; Seine, G.; Paillard, V.; Poumirol, J. M.; Larrieu, G.; Royet, A. S.; Kerdiles, S.; Acosta-Alba, P.; Perego, M.; Bonafos, C.; Cristiano, F.
Doping of silicon with phosphorus end-terminated polymers: source characterization and dopant diffusion in SiO2
2021 Perego, Michele; Seguini, Gabriele; Mascheroni, Edoardo; Arduca, Elisa; Gianotti, Valentina; Laus, Michele
| Titolo | Data di pubblicazione | Autore(i) | File |
|---|---|---|---|
| Al2O3 growth in PMMA thin films by sequential infiltration synthesis: in situ thickness evolution and mass uptake investigation | 1-gen-2024 | Perego, M.; Seguini, G.; Wiemer, C.; Caligiore, F. E.; Cianci, E. | |
| Donor incomplete ionization and mobility enhancement in ultra-thin silicon-on-insulator films doped by phosphorus end-terminated polymers | 1-gen-2024 | Pulici, Andrea; Kuschlan, Stefano; Seguini, Gabriele; De Michielis, Marco; Chiarcos, Riccardo; Laus, Michele; Fanciulli, Marco; Perego, Michele | |
| Fabrication of nitrogen-hyperdoped silicon by high-pressure gas immersion excimer laser doping | 1-gen-2024 | Barkby, Josh W.; Moro, Fabrizio; Perego, Michele; Taglietti, Fabiana; Lidorikis, Elefterios; Kalfagiannis, Nikolaos; Koutsogeorgis, Demosthenes C.; Fanciulli, Marco | |
| Polymeric precision doping as an emerging technology for the downscaling of microelectronic devices: State of the art | 1-gen-2024 | Chiarcos, R.; Laus, M.; Perego, M. | |
| Polystyrene Brush Evolution by Grafting to Reaction on Deglazed and Not-Deglazed Silicon Substrates | 1-gen-2024 | Ivaldi, C.; Ospina Guarin, V. M.; Antonioli, D.; Zuccheri, G.; Sparnacci, K.; Gianotti, V.; Perego, M.; Chiarcos, R.; Laus, M. | |
| Sequential Infiltration Synthesis of Al2O3 in PMMA Thin Films: Temperature Investigation by Operando Spectroscopic Ellipsometry | 1-gen-2024 | Motta, A.; Seguini, G.; Wiemer, C.; Perego, M. | |
| Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers | 1-gen-2023 | Pulici, Andrea; Kuschlan, Stefano; Seguini, Gabriele; Taglietti, Fabiana; Fanciulli, Marco; Chiarcos, Riccardo; Laus, Michele; Perego, Michele | |
| Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film | 1-gen-2023 | Kuschlan, Stefano; Chiarcos, Riccardo; Laus, Michele; Perezmurano, Francesc; Llobet, Jordi; Fernandezregulez, Marta; Bonafos, Caroline; Perego, Michele; Seguini, Gabriele; DE MICHIELIS, Marco; Tallarida, Graziella | |
| Phosphorus activation in silicon: To deglaze or not to deglaze, that is the question | 1-gen-2023 | Barin, Gianluca; Seguini, Gabriele; Chiarcos, Riccardo; Ospina, Viviana Maria; Laus, Michele; Lenardi, Cristina; Perego, Michele | |
| Plasma-Assisted Atomic Layer Deposition of IrO2 for Neuroelectronics | 1-gen-2023 | Di Palma, Valerio; Pianalto, Andrea; Perego, Michele; Tallarida, Graziella; Codegoni, Davide; Fanciulli, Marco | |
| Polymer Brushes by Grafting to Reaction in Melt: New Insights into the Mechanism | 1-gen-2023 | Chiarcos, R.; Perego, M.; Laus, M. | |
| Al2O3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication | 1-gen-2022 | Seguini, Gabriele; Motta, Alessia; Bigatti, Marco; Caligiore Federica, E; Rademaker, Guido; Gharbi, Ahmed; Tiron, Raluca; Tallarida, Graziella; Perego, Michele; Cianci, Elena | |
| Brush Layers of Bioinspired Polypeptoids for Deterministic Doping of Semiconductors | 1-gen-2022 | Ospina, V. M.; Chiarcos, R.; Antonioli, D.; Gianotti, V.; Laus, M.; Kuschlan, S.; Wiemer, C.; Perego, M. | |
| Characterization of biodegradable polybutylene succinate modified by sequential infiltration of Al2O3 | 1-gen-2022 | Pulvirenti, Alfio; Boccia, ANTONELLA CATERINA; Consonni, Roberto; Motta, Alessia; Perego, Michele; Cerruti, Pierfrancesco; Wiemer, Claudia; Sparvoli, Francesca | |
| Improving HfO2-Based Resistive Switching Devices by Inserting a TaOxThin Film via Engineered In Situ Oxidation | 1-gen-2022 | Wang, T.; Brivio, S.; Cianci, E.; Wiemer, C.; Perego, M.; Spiga, S.; Lanza, M. | |
| Influence of spin casting solvent on the self-assembly of silicon-containing block copolymer thin films via high temperature thermal treatment | 1-gen-2022 | Giammaria, T. J.; Laus, M.; Chiarcos, R.; Ober, C. K.; Seguini, G.; Perego, M. | |
| Sequential Infiltration Synthesis of Al2O3in Biodegradable Polybutylene Succinate: Characterization of the Infiltration Mechanism | 1-gen-2022 | Motta, Alessia; Seguini, Gabriele; Perego, Michele; Consonni, Roberto; Boccia, ANTONELLA CATERINA; Ambrosio, Gina; Baratto, Camilla; Cerruti, Pierfrancesco; Lavorgna, Marino; Tagliabue, Stefano; Wiemer, Claudia | |
| Short vs. long chains competition during “grafting to” process from melt | 1-gen-2022 | Chiarcos, R.; Antonioli, D.; Gianotti, V.; Laus, M.; Munao, G.; Milano, G.; De Nicola, A.; Perego, M. | |
| Study of recrystallization and activation processes in thin and highly doped silicon-on-insulator layers by nanosecond laser thermal annealing | 1-gen-2022 | Chery, N.; Zhang, M.; Monflier, R.; Mallet, N.; Seine, G.; Paillard, V.; Poumirol, J. M.; Larrieu, G.; Royet, A. S.; Kerdiles, S.; Acosta-Alba, P.; Perego, M.; Bonafos, C.; Cristiano, F. | |
| Doping of silicon with phosphorus end-terminated polymers: source characterization and dopant diffusion in SiO2 | 1-gen-2021 | Perego, Michele; Seguini, Gabriele; Mascheroni, Edoardo; Arduca, Elisa; Gianotti, Valentina; Laus, Michele |