PEREGO, MICHELE
PEREGO, MICHELE
Istituto per la Microelettronica e Microsistemi - IMM - Sede Secondaria Agrate Brianza
Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film
2023 Kuschlan, Stefano; Chiarcos, Riccardo; Laus, Michele; Perezmurano, Francesc; Llobet, Jordi; Fernandezregulez, Marta; Bonafos, Caroline; Perego, Michele; Seguini, Gabriele; DE MICHIELIS, Marco; Tallarida, Graziella
Plasma-Assisted Atomic Layer Deposition of IrO2 for Neuroelectronics
2023 Di Palma, Valerio; Pianalto, Andrea; Perego, Michele; Tallarida, Graziella; Codegoni, Davide; Fanciulli, Marco
Al2O3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication
2022 Seguini, Gabriele; Motta, Alessia; Bigatti, Marco; Caligiore Federica, E; Rademaker, Guido; Gharbi, Ahmed; Tiron, Raluca; Tallarida, Graziella; Perego, Michele; Cianci, Elena
Characterization of biodegradable polybutylene succinate modified by sequential infiltration of Al2O3
2022 Pulvirenti, Alfio; Boccia, ANTONELLA CATERINA; Consonni, Roberto; Motta, Alessia; Perego, Michele; Cerruti, Pierfrancesco; Wiemer, Claudia; Sparvoli, Francesca
Sequential Infiltration Synthesis of Al2O3in Biodegradable Polybutylene Succinate: Characterization of the Infiltration Mechanism
2022 Motta, Alessia; Seguini, Gabriele; Perego, Michele; Consonni, Roberto; Boccia, ANTONELLA CATERINA; Ambrosio, Gina; Baratto, Camilla; Cerruti, Pierfrancesco; Lavorgna, Marino; Tagliabue, Stefano; Wiemer, Claudia
Doping of silicon with phosphorus end-terminated polymers: source characterization and dopant diffusion in SiO2
2021 Perego, Michele; Seguini, Gabriele; Mascheroni, Edoardo; Arduca, Elisa; Gianotti, Valentina; Laus, Michele
Engineering of the spin on dopant process on silicon on insulator substrate
2021 Barri, Chiara; Mafakheri, Erfan; Fagiani, Luca; Tavani, Giulio; Barzaghi, Andrea; Chrastina, Daniel; Fedorov, Alexey; Frigerio, Jacopo; Lodari, Mario; Scotognella, Francesco; Arduca, Elisa; Abbarchi, Marco; Perego, Michele; Bollani, Monica
Evidence of Mechanochemical Control in "grafting to" Reactions of Hydroxy-Terminated Statistical Copolymers
2021 Laus, M.; Chiarcos, R.; Gianotti, V.; Antonioli, D.; Sparnacci, K.; Munao, G.; Milano, G.; De Nicola, A.; Perego, M.
Bottom-Up Assembly of Micro/Nanostructures
2020 Mastrangeli M.; Perego M.
Doping of silicon by phosphorus end-terminated polymers: Drive-in and activation of dopants
2020 Perego, M; Caruso, F; Seguini, G; Arduca, E; Mantovan, R; Sparnacci, K; Laus, M
Effect of Trapped Solvent on the Interface between PS-b-PMMA Thin Films and P(S-r-MMA) Brush Layers
2020 Sparnacci K.; Chiarcos R.; Gianotti V.; Laus M.; Giammaria T.J.; Perego M.; Munao G.; Milano G.; De Nicola A.; Haese M.; Kreuzer L.P.; Widmann T.; MullerBuschbaum P.
REFERENCE-STANDARDDEVICEFOR CALIBRATION OF MEASUREMENTS OF LENGT AND CORRESPONDING CALIBRATION PROCESS
2020 Boarino, L; Ferrarese Lupi, F; Aprile, G; De Leo, N; Perego, M; Laus, M; Zuccheri, G; Seguini, G
Thermodynamics and ordering kinetics in asymmetric PS-: B-PMMA block copolymer thin films
2020 Seguini, G; Zanenga, F; Cannetti, G; Perego, M
Effect of the Density of Reactive Sites in P(S-r-MMA) Film during Al2O3 Growth by Sequential Infiltration Synthesis
2019 Caligiore, Federica E.; Nazzari, Daniele; Cianci, Elena; Sparnacci, Katia; Laus, Michele; Perego, Michele; Seguini, Gabriele
Thermal Degradation in Ultrathin Films Outperforms Dose Control of n-Type Polymeric Dopants for Silicon
2019 Chiarcos, Riccardo; Gianotti, Valentina; Cossi, Maurizio; Zoccante, Alberto; Antonioli, Diego; Sparnacci, Katia; Laus, Michele; Caligiore, Federica Elvira; Perego, Michele
Control of Doping Level in Semiconductors via Self-Limited Grafting of Phosphorus End-Terminated Polymers
2018 Perego, Michele; Seguini, Gabriele; Arduca, Elisa; Nomellini, Andrea; Sparnacci, Katia; Antonioli, Diego; Gianotti, Valentina; Laus, Michele
Development and Synchrotron-Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques
2018 Dialameh, Masoud; Ferrarese Lupi, Federico; Hönicke, Philipp; Kayser, Yves; Beckhoff, Burkhard; Weimann, Thomas; Fleischmann, Claudia; Vandervorst, Wilfried; Dubek, Pavo; Pivac, Branko; Perego, Michele; Seguini, Gabriele; De Leo, Natascia; Boarino, Luca
Electronic band structures of undoped and P-doped Si nanocrystals embedded in SiO2
2018 Arduca, E; Seguini, G; Martella, C; Lamperti, A; Napolitani, E; De Salvador, D; Nicotra, G; Scuderi, M; Spinella, C; Perego, M
Hierarchical Order in Dewetted Block Copolymer Thin Films on Chemically Patterned Surfaces
2018 Ferrarese, Lupi; Federico, ; Giammaria, ; Tommaso, Jacopo; Miti, ; Andrea, ; Zuccheri, ; Giampaolo, ; Carignano, ; Stefano, ; Sparnacci, ; Katia, ; Seguini, Gabriele; Seguini, Gabriele; De, Leo; Natascia, ; Boarino, ; Luca, ; Perego, Michele; Perego, Michele; Laus, ; Perego, Michele
Ordering kinetics in two-dimensional hexagonal pattern of cylinder-forming PS- b -PMMA block copolymer thin films: Dependence on the segregation strength
2018 Seguini, Gabriele; Zanenga, Fabio; Laus, Michele; Perego, Michele
Titolo | Data di pubblicazione | Autore(i) | File |
---|---|---|---|
Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film | 1-gen-2023 | Kuschlan, Stefano; Chiarcos, Riccardo; Laus, Michele; Perezmurano, Francesc; Llobet, Jordi; Fernandezregulez, Marta; Bonafos, Caroline; Perego, Michele; Seguini, Gabriele; DE MICHIELIS, Marco; Tallarida, Graziella | |
Plasma-Assisted Atomic Layer Deposition of IrO2 for Neuroelectronics | 1-gen-2023 | Di Palma, Valerio; Pianalto, Andrea; Perego, Michele; Tallarida, Graziella; Codegoni, Davide; Fanciulli, Marco | |
Al2O3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication | 1-gen-2022 | Seguini, Gabriele; Motta, Alessia; Bigatti, Marco; Caligiore Federica, E; Rademaker, Guido; Gharbi, Ahmed; Tiron, Raluca; Tallarida, Graziella; Perego, Michele; Cianci, Elena | |
Characterization of biodegradable polybutylene succinate modified by sequential infiltration of Al2O3 | 1-gen-2022 | Pulvirenti, Alfio; Boccia, ANTONELLA CATERINA; Consonni, Roberto; Motta, Alessia; Perego, Michele; Cerruti, Pierfrancesco; Wiemer, Claudia; Sparvoli, Francesca | |
Sequential Infiltration Synthesis of Al2O3in Biodegradable Polybutylene Succinate: Characterization of the Infiltration Mechanism | 1-gen-2022 | Motta, Alessia; Seguini, Gabriele; Perego, Michele; Consonni, Roberto; Boccia, ANTONELLA CATERINA; Ambrosio, Gina; Baratto, Camilla; Cerruti, Pierfrancesco; Lavorgna, Marino; Tagliabue, Stefano; Wiemer, Claudia | |
Doping of silicon with phosphorus end-terminated polymers: source characterization and dopant diffusion in SiO2 | 1-gen-2021 | Perego, Michele; Seguini, Gabriele; Mascheroni, Edoardo; Arduca, Elisa; Gianotti, Valentina; Laus, Michele | |
Engineering of the spin on dopant process on silicon on insulator substrate | 1-gen-2021 | Barri, Chiara; Mafakheri, Erfan; Fagiani, Luca; Tavani, Giulio; Barzaghi, Andrea; Chrastina, Daniel; Fedorov, Alexey; Frigerio, Jacopo; Lodari, Mario; Scotognella, Francesco; Arduca, Elisa; Abbarchi, Marco; Perego, Michele; Bollani, Monica | |
Evidence of Mechanochemical Control in "grafting to" Reactions of Hydroxy-Terminated Statistical Copolymers | 1-gen-2021 | Laus, M.; Chiarcos, R.; Gianotti, V.; Antonioli, D.; Sparnacci, K.; Munao, G.; Milano, G.; De Nicola, A.; Perego, M. | |
Bottom-Up Assembly of Micro/Nanostructures | 1-gen-2020 | Mastrangeli M.; Perego M. | |
Doping of silicon by phosphorus end-terminated polymers: Drive-in and activation of dopants | 1-gen-2020 | Perego, M; Caruso, F; Seguini, G; Arduca, E; Mantovan, R; Sparnacci, K; Laus, M | |
Effect of Trapped Solvent on the Interface between PS-b-PMMA Thin Films and P(S-r-MMA) Brush Layers | 1-gen-2020 | Sparnacci K.; Chiarcos R.; Gianotti V.; Laus M.; Giammaria T.J.; Perego M.; Munao G.; Milano G.; De Nicola A.; Haese M.; Kreuzer L.P.; Widmann T.; MullerBuschbaum P. | |
REFERENCE-STANDARDDEVICEFOR CALIBRATION OF MEASUREMENTS OF LENGT AND CORRESPONDING CALIBRATION PROCESS | 1-gen-2020 | Boarino, L; Ferrarese Lupi, F; Aprile, G; De Leo, N; Perego, M; Laus, M; Zuccheri, G; Seguini, G | |
Thermodynamics and ordering kinetics in asymmetric PS-: B-PMMA block copolymer thin films | 1-gen-2020 | Seguini, G; Zanenga, F; Cannetti, G; Perego, M | |
Effect of the Density of Reactive Sites in P(S-r-MMA) Film during Al2O3 Growth by Sequential Infiltration Synthesis | 1-gen-2019 | Caligiore, Federica E.; Nazzari, Daniele; Cianci, Elena; Sparnacci, Katia; Laus, Michele; Perego, Michele; Seguini, Gabriele | |
Thermal Degradation in Ultrathin Films Outperforms Dose Control of n-Type Polymeric Dopants for Silicon | 1-gen-2019 | Chiarcos, Riccardo; Gianotti, Valentina; Cossi, Maurizio; Zoccante, Alberto; Antonioli, Diego; Sparnacci, Katia; Laus, Michele; Caligiore, Federica Elvira; Perego, Michele | |
Control of Doping Level in Semiconductors via Self-Limited Grafting of Phosphorus End-Terminated Polymers | 1-gen-2018 | Perego, Michele; Seguini, Gabriele; Arduca, Elisa; Nomellini, Andrea; Sparnacci, Katia; Antonioli, Diego; Gianotti, Valentina; Laus, Michele | |
Development and Synchrotron-Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques | 1-gen-2018 | Dialameh, Masoud; Ferrarese Lupi, Federico; Hönicke, Philipp; Kayser, Yves; Beckhoff, Burkhard; Weimann, Thomas; Fleischmann, Claudia; Vandervorst, Wilfried; Dubek, Pavo; Pivac, Branko; Perego, Michele; Seguini, Gabriele; De Leo, Natascia; Boarino, Luca | |
Electronic band structures of undoped and P-doped Si nanocrystals embedded in SiO2 | 1-gen-2018 | Arduca, E; Seguini, G; Martella, C; Lamperti, A; Napolitani, E; De Salvador, D; Nicotra, G; Scuderi, M; Spinella, C; Perego, M | |
Hierarchical Order in Dewetted Block Copolymer Thin Films on Chemically Patterned Surfaces | 1-gen-2018 | Ferrarese, Lupi; Federico, ; Giammaria, ; Tommaso, Jacopo; Miti, ; Andrea, ; Zuccheri, ; Giampaolo, ; Carignano, ; Stefano, ; Sparnacci, ; Katia, ; Seguini, Gabriele; Seguini, Gabriele; De, Leo; Natascia, ; Boarino, ; Luca, ; Perego, Michele; Perego, Michele; Laus, ; Perego, Michele | |
Ordering kinetics in two-dimensional hexagonal pattern of cylinder-forming PS- b -PMMA block copolymer thin films: Dependence on the segregation strength | 1-gen-2018 | Seguini, Gabriele; Zanenga, Fabio; Laus, Michele; Perego, Michele |