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PEREGO, MICHELE

PEREGO, MICHELE  

Istituto per la Microelettronica e Microsistemi - IMM  

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Risultati 1 - 20 di 144 (tempo di esecuzione: 0.087 secondi).
Titolo Data di pubblicazione Autore(i) File
Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film 1-gen-2023 Kuschlan, Stefano; Chiarcos, Riccardo; Laus, Michele; Perezmurano, Francesc; Llobet, Jordi; Fernandezregulez, Marta; Bonafos, Caroline; Perego, Michele; Seguini, Gabriele; DE MICHIELIS, Marco; Tallarida, Graziella
Plasma-Assisted Atomic Layer Deposition of IrO2 for Neuroelectronics 1-gen-2023 Di Palma, Valerio; Pianalto, Andrea; Perego, Michele; Tallarida, Graziella; Codegoni, Davide; Fanciulli, Marco
Al2O3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication 1-gen-2022 Seguini, Gabriele; Motta, Alessia; Bigatti, Marco; Caligiore Federica, E; Rademaker, Guido; Gharbi, Ahmed; Tiron, Raluca; Tallarida, Graziella; Perego, Michele; Cianci, Elena
Characterization of biodegradable polybutylene succinate modified by sequential infiltration of Al2O3 1-gen-2022 Pulvirenti, Alfio; Boccia, ANTONELLA CATERINA; Consonni, Roberto; Motta, Alessia; Perego, Michele; Cerruti, Pierfrancesco; Wiemer, Claudia; Sparvoli, Francesca
Sequential Infiltration Synthesis of Al2O3in Biodegradable Polybutylene Succinate: Characterization of the Infiltration Mechanism 1-gen-2022 Motta, Alessia; Seguini, Gabriele; Perego, Michele; Consonni, Roberto; Boccia, ANTONELLA CATERINA; Ambrosio, Gina; Baratto, Camilla; Cerruti, Pierfrancesco; Lavorgna, Marino; Tagliabue, Stefano; Wiemer, Claudia
Doping of silicon with phosphorus end-terminated polymers: source characterization and dopant diffusion in SiO2 1-gen-2021 Perego; Michele;Seguini; Gabriele;Mascheroni; Edoardo;Arduca; Elisa;Gianotti; Valentina;Laus; Michele
Engineering of the spin on dopant process on silicon on insulator substrate 1-gen-2021 Barri, Chiara; Mafakheri, Erfan; Fagiani, Luca; Tavani, Giulio; Barzaghi, Andrea; Chrastina, Daniel; Fedorov, Alexey; Frigerio, Jacopo; Lodari, Mario; Scotognella, Francesco; Arduca, Elisa; Abbarchi, Marco; Perego, Michele; Bollani, Monica
Evidence of Mechanochemical Control in "grafting to" Reactions of Hydroxy-Terminated Statistical Copolymers 1-gen-2021 Laus, M; Chiarcos, R; Gianotti, V; Antonioli, D; Sparnacci, K; Munao, G; Milano, G; De Nicola, A; Perego, M
Bottom-Up Assembly of Micro/Nanostructures 1-gen-2020 Mastrangeli M.; Perego M.
Doping of silicon by phosphorus end-terminated polymers: Drive-in and activation of dopants 1-gen-2020 Perego, M; Caruso, F; Seguini, G; Arduca, E; Mantovan, R; Sparnacci, K; Laus, M
Effect of Trapped Solvent on the Interface between PS-b-PMMA Thin Films and P(S-r-MMA) Brush Layers 1-gen-2020 Sparnacci K.; Chiarcos R.; Gianotti V.; Laus M.; Giammaria T.J.; Perego M.; Munao G.; Milano G.; De Nicola A.; Haese M.; Kreuzer L.P.; Widmann T.; MullerBuschbaum P.
REFERENCE-STANDARDDEVICEFOR CALIBRATION OF MEASUREMENTS OF LENGT AND CORRESPONDING CALIBRATION PROCESS 1-gen-2020 Boarino, L; Ferrarese Lupi, F; Aprile, G; De Leo, N; Perego, M; Laus, M; Zuccheri, G; Seguini, G
Thermodynamics and ordering kinetics in asymmetric PS-: B-PMMA block copolymer thin films 1-gen-2020 Seguini, G; Zanenga, F; Cannetti, G; Perego, M
Effect of the Density of Reactive Sites in P(S-r-MMA) Film during Al2O3 Growth by Sequential Infiltration Synthesis 1-gen-2019 Caligiore, Federica E.; Nazzari, Daniele; Cianci, Elena; Sparnacci, Katia; Laus, Michele; Perego, Michele; Seguini, Gabriele
Thermal Degradation in Ultrathin Films Outperforms Dose Control of n-Type Polymeric Dopants for Silicon 1-gen-2019 Chiarcos, Riccardo; Gianotti, Valentina; Cossi, Maurizio; Zoccante, Alberto; Antonioli, Diego; Sparnacci, Katia; Laus, Michele; Caligiore, Federica Elvira; Perego, Michele
Control of Doping Level in Semiconductors via Self-Limited Grafting of Phosphorus End-Terminated Polymers 1-gen-2018 Perego, Michele; Seguini, Gabriele; Arduca, Elisa; Nomellini, Andrea; Sparnacci, Katia; Antonioli, Diego; Gianotti, Valentina; Laus, Michele
Development and Synchrotron-Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques 1-gen-2018 Dialameh, Masoud; Ferrarese Lupi, Federico; Hönicke, Philipp; Kayser, Yves; Beckhoff, Burkhard; Weimann, Thomas; Fleischmann, Claudia; Vandervorst, Wilfried; Dubek, Pavo; Pivac, Branko; Perego, Michele; Seguini, Gabriele; De Leo, Natascia; Boarino, Luca
Electronic band structures of undoped and P-doped Si nanocrystals embedded in SiO2 1-gen-2018 Arduca, E; Seguini, G; Martella, C; Lamperti, A; Napolitani, E; De Salvador, D; Nicotra, G; Scuderi, M; Spinella, C; Perego, M
Hierarchical Order in Dewetted Block Copolymer Thin Films on Chemically Patterned Surfaces 1-gen-2018 Ferrarese, Lupi; Federico, ; Giammaria, ; Tommaso, Jacopo; Miti, ; Andrea, ; Zuccheri, ; Giampaolo, ; Carignano, ; Stefano, ; Sparnacci, ; Katia, ; Seguini, Gabriele; Seguini, Gabriele; De, Leo; Natascia, ; Boarino, ; Luca, ; Perego, Michele; Perego, Michele; Laus, ; Perego, Michele
Ordering kinetics in two-dimensional hexagonal pattern of cylinder-forming PS- b -PMMA block copolymer thin films: Dependence on the segregation strength 1-gen-2018 Seguini, Gabriele; Zanenga, Fabio; Laus, Michele; Perego, Michele