PEREGO, MICHELE
PEREGO, MICHELE
Istituto per la Microelettronica e Microsistemi - IMM
Al2O3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication
2022 Seguini, Gabriele; Motta, Alessia; Bigatti, Marco; Caligiore Federica, E; Rademaker, Guido; Gharbi, Ahmed; Tiron, Raluca; Tallarida, Graziella; Perego, Michele; Cianci, Elena
Al2O3 passivation on c-Si surfaces for low temperature solar cell applications
2013 Saynova, Desislava S.; Janssen, Gaby J. M.; Burgers, Antonius R.; Mewe, Agnes A.; Cianci, Elena; Seguini, Gabriele; Perego, Michele
Atomic layer deposition of magnetic thin films
2007 Mantovan, R; Georcieva, M; Perego, M; Lu, HL; Zenkevich, A; Scarel, G; Fanciulli, M
Atomic layer deposition of NiO films on Si(100) using cyclopentadienyl-type compounds and ozone as precursors
2008 Lu, Hl; Scarel, G; Wiemer, C; Perego, M; Spiga, S; Fanciulli, M; Pavia, G
Atomic oxygen-assisted molecular beam deposition of Gd2O3 films for ultra-scaled Ge-based electronic devices
2008 A. Molle; S. Spiga; M. N. K. Bhuiyan; G. Tallarida; M. Perego; C. Wiemer; M. Fanciulli
Behavior of phosphorous and contaminants from molecular doping combined with a conventional spike annealing method
2014 Shimizu, Yasuo; Takamizawa, Hisashi; Inoue, Koji; Yano, Fumiko; Nagai, Yasuyoshi; Lamagna, Luca; Mazzeo, Giovanni; Perego, Michele; Prati, Enrico
Bottom-Up Assembly of Micro/Nanostructures
2020 Mastrangeli M.; Perego M.
Characterization of gate oxynitrides by means of time of flight secondary ion mass spectrometry and x-ray photoelectron spectroscopy. Quantification of nitrogen
2002 Ferrari, S; Perego, M; Fanciulli, ; M,
Characterization of silicon nanocrystals embedded in thin oxide layers by TOF-SIMS
2004 Perego; M.a;Ferrari; S.a;Fanciulli; M.a;Assayag; G.B.b;Bonafos; C.b;Carrada; M.b;Claverie; A.b
Characterization of ultra-thin polymeric films by Gas chromatography-Mass spectrometry hyphenated to thermogravimetry
2014 Gianotti, Valentina; Antonioli, Diego; Sparnacci, Katia; Laus, Michele; Giammaria, TOMMASO JACOPO; Ceresoli, Monica; FERRARESE LUPI, Federico; Seguini, Gabriele; Perego, Michele
Charging phenomena in dielectric/semiconductor heterostructures during x-ray photoelectron spectroscopy measurements
2011 Perego, M; Seguini, Gabriele; G,
Chemical and Structural Properties of a TaN/HfO2 Gate Stack Processed Using Atomic Vapor Deposition
2009 Gaumer, C; Martinez, E; Lhostis, S; Wiemer, C; Perego, M; Loup, V; Lafond, D; Fabbri, Jm
Collective behavior of block copolymer thin films within periodic topographical structures
2013 Perego, M.; Andreozzi, A.; Vellei, A.; Ferrarese Lupi, F.; Seguini, G.
Collective behavior of block copolymer thin films within periodic topographical structures
2013 Perego, M; Andreozzi, A; Vellei, A; Ferrarese Lupi, F; Seguini, Gabriele; G,
Comparative study of negative cluster emission in sputtering of Si, Ge and their oxides
2006 Perego, M; Ferrari, S; Fanciulli, M
Composition of ultrathin binary polymer brushes by thermogravimetry-gas chromatography-mass spectrometry
2016 Antonioli, Diego; Sparnacci, Katia; Laus, Michele; Ferrarese Lupi, Federico; Giammaria, TOMMASO JACOPO; Seguini, Gabriele; Ceresoli, Monica; Perego, Michele; Gianotti, Valentina
Conduction band offset of HfO2 on GaAs
2007 Seguini, G; Perego, M; Spiga, S; Fanciulli, M; Dimoulas, A
Control of Doping Level in Semiconductors via Self-Limited Grafting of Phosphorus End-Terminated Polymers
2018 Perego, Michele; Seguini, Gabriele; Arduca, Elisa; Nomellini, Andrea; Sparnacci, Katia; Antonioli, Diego; Gianotti, Valentina; Laus, Michele
Detection and characterization of silicon nanocrystals embedded in thin oxide layers
2004 Perego; M.a;Ferrari; S.a;Fanciulli; M.a;Assayag; G.B.b;Bonafos; C.b;Carrada; M.b;Claverie; A.b
Development and Synchrotron-Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques
2018 Dialameh, Masoud; Ferrarese Lupi, Federico; Hönicke, Philipp; Kayser, Yves; Beckhoff, Burkhard; Weimann, Thomas; Fleischmann, Claudia; Vandervorst, Wilfried; Dubek, Pavo; Pivac, Branko; Perego, Michele; Seguini, Gabriele; De Leo, Natascia; Boarino, Luca
Titolo | Data di pubblicazione | Autore(i) | File |
---|---|---|---|
Al2O3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication | 1-gen-2022 | Seguini, Gabriele; Motta, Alessia; Bigatti, Marco; Caligiore Federica, E; Rademaker, Guido; Gharbi, Ahmed; Tiron, Raluca; Tallarida, Graziella; Perego, Michele; Cianci, Elena | |
Al2O3 passivation on c-Si surfaces for low temperature solar cell applications | 1-gen-2013 | Saynova, Desislava S.; Janssen, Gaby J. M.; Burgers, Antonius R.; Mewe, Agnes A.; Cianci, Elena; Seguini, Gabriele; Perego, Michele | |
Atomic layer deposition of magnetic thin films | 1-gen-2007 | Mantovan, R; Georcieva, M; Perego, M; Lu, HL; Zenkevich, A; Scarel, G; Fanciulli, M | |
Atomic layer deposition of NiO films on Si(100) using cyclopentadienyl-type compounds and ozone as precursors | 1-gen-2008 | Lu, Hl; Scarel, G; Wiemer, C; Perego, M; Spiga, S; Fanciulli, M; Pavia, G | |
Atomic oxygen-assisted molecular beam deposition of Gd2O3 films for ultra-scaled Ge-based electronic devices | 1-gen-2008 | A. Molle; S. Spiga; M. N. K. Bhuiyan; G. Tallarida; M. Perego; C. Wiemer; M. Fanciulli | |
Behavior of phosphorous and contaminants from molecular doping combined with a conventional spike annealing method | 1-gen-2014 | Shimizu, Yasuo; Takamizawa, Hisashi; Inoue, Koji; Yano, Fumiko; Nagai, Yasuyoshi; Lamagna, Luca; Mazzeo, Giovanni; Perego, Michele; Prati, Enrico | |
Bottom-Up Assembly of Micro/Nanostructures | 1-gen-2020 | Mastrangeli M.; Perego M. | |
Characterization of gate oxynitrides by means of time of flight secondary ion mass spectrometry and x-ray photoelectron spectroscopy. Quantification of nitrogen | 1-gen-2002 | Ferrari, S; Perego, M; Fanciulli, ; M, | |
Characterization of silicon nanocrystals embedded in thin oxide layers by TOF-SIMS | 1-gen-2004 | Perego; M.a;Ferrari; S.a;Fanciulli; M.a;Assayag; G.B.b;Bonafos; C.b;Carrada; M.b;Claverie; A.b | |
Characterization of ultra-thin polymeric films by Gas chromatography-Mass spectrometry hyphenated to thermogravimetry | 1-gen-2014 | Gianotti, Valentina; Antonioli, Diego; Sparnacci, Katia; Laus, Michele; Giammaria, TOMMASO JACOPO; Ceresoli, Monica; FERRARESE LUPI, Federico; Seguini, Gabriele; Perego, Michele | |
Charging phenomena in dielectric/semiconductor heterostructures during x-ray photoelectron spectroscopy measurements | 1-gen-2011 | Perego, M; Seguini, Gabriele; G, | |
Chemical and Structural Properties of a TaN/HfO2 Gate Stack Processed Using Atomic Vapor Deposition | 1-gen-2009 | Gaumer, C; Martinez, E; Lhostis, S; Wiemer, C; Perego, M; Loup, V; Lafond, D; Fabbri, Jm | |
Collective behavior of block copolymer thin films within periodic topographical structures | 1-gen-2013 | Perego, M.; Andreozzi, A.; Vellei, A.; Ferrarese Lupi, F.; Seguini, G. | |
Collective behavior of block copolymer thin films within periodic topographical structures | 1-gen-2013 | Perego, M; Andreozzi, A; Vellei, A; Ferrarese Lupi, F; Seguini, Gabriele; G, | |
Comparative study of negative cluster emission in sputtering of Si, Ge and their oxides | 1-gen-2006 | Perego, M; Ferrari, S; Fanciulli, M | |
Composition of ultrathin binary polymer brushes by thermogravimetry-gas chromatography-mass spectrometry | 1-gen-2016 | Antonioli, Diego; Sparnacci, Katia; Laus, Michele; Ferrarese Lupi, Federico; Giammaria, TOMMASO JACOPO; Seguini, Gabriele; Ceresoli, Monica; Perego, Michele; Gianotti, Valentina | |
Conduction band offset of HfO2 on GaAs | 1-gen-2007 | Seguini, G; Perego, M; Spiga, S; Fanciulli, M; Dimoulas, A | |
Control of Doping Level in Semiconductors via Self-Limited Grafting of Phosphorus End-Terminated Polymers | 1-gen-2018 | Perego, Michele; Seguini, Gabriele; Arduca, Elisa; Nomellini, Andrea; Sparnacci, Katia; Antonioli, Diego; Gianotti, Valentina; Laus, Michele | |
Detection and characterization of silicon nanocrystals embedded in thin oxide layers | 1-gen-2004 | Perego; M.a;Ferrari; S.a;Fanciulli; M.a;Assayag; G.B.b;Bonafos; C.b;Carrada; M.b;Claverie; A.b | |
Development and Synchrotron-Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques | 1-gen-2018 | Dialameh, Masoud; Ferrarese Lupi, Federico; Hönicke, Philipp; Kayser, Yves; Beckhoff, Burkhard; Weimann, Thomas; Fleischmann, Claudia; Vandervorst, Wilfried; Dubek, Pavo; Pivac, Branko; Perego, Michele; Seguini, Gabriele; De Leo, Natascia; Boarino, Luca |