The ability of scanning electron acoustic microscopy (SEAM) to image misfit dislocations in heterostructures is shown in the case of InGaAs/GaAs superlattices. The SEAM images are compared with panchromatic cathodoluminescence (PCL) images of the same samples and the differences are discussed.
SCANNING ELECTRON-ACOUSTIC MICROSCOPY OF MISFIT DISLOCATIONS IN INGAAS/GAAS SUPERLATTICES
G Salviati;L Lazzarini
1993
Abstract
The ability of scanning electron acoustic microscopy (SEAM) to image misfit dislocations in heterostructures is shown in the case of InGaAs/GaAs superlattices. The SEAM images are compared with panchromatic cathodoluminescence (PCL) images of the same samples and the differences are discussed.File in questo prodotto:
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