Hall magnetometers with active areas down to 100 x 100 nm(2) were fabricated patterning gold and Si-doped GaAs films by focused ion beam. For GaAs probes, electrical characterization shows that the magnetic flux sensitivity is better than 10(-2)Phi(0) at room temperature. Hall nano-probes made of gold can work down to liquid helium temperature with magnetic flux sensitivity 10(-1)Phi(0).
Hall nano-probes fabricated by focused ion beam
Candini A;Di Bona A;Affronte M;Ercolani D;Biasiol G;Sorba L
2006
Abstract
Hall magnetometers with active areas down to 100 x 100 nm(2) were fabricated patterning gold and Si-doped GaAs films by focused ion beam. For GaAs probes, electrical characterization shows that the magnetic flux sensitivity is better than 10(-2)Phi(0) at room temperature. Hall nano-probes made of gold can work down to liquid helium temperature with magnetic flux sensitivity 10(-1)Phi(0).File in questo prodotto:
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