The formation, composition and propagation of pulsed laser produced plasma plumes from an AlN target have been studied in real time by spatially and temporally resolved optical spectroscopy. The mean front velocity has been measured and appears to be slightly slower in the presence of added gas than in vacuum. In the initial stage of expansion, this velocity is almost the same for all neutral particles in the plume in the initial stage of expansion. Velocities of neutral and ionic species have been measured by their time of arrival from the target to a quadrupole mass spectrometer and their expansion beam Maxwell-Boltzmann (MB) temperature determined. The plume electronic temperature has been determined by assuming a local thermodynamic equilibrium of the emitting species.
Composition and gas dynamics of laser ablated AlN plumes
Di Palma T;S Orlando;
1995
Abstract
The formation, composition and propagation of pulsed laser produced plasma plumes from an AlN target have been studied in real time by spatially and temporally resolved optical spectroscopy. The mean front velocity has been measured and appears to be slightly slower in the presence of added gas than in vacuum. In the initial stage of expansion, this velocity is almost the same for all neutral particles in the plume in the initial stage of expansion. Velocities of neutral and ionic species have been measured by their time of arrival from the target to a quadrupole mass spectrometer and their expansion beam Maxwell-Boltzmann (MB) temperature determined. The plume electronic temperature has been determined by assuming a local thermodynamic equilibrium of the emitting species.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
