Conventional, high-resolution electron microscopy and electron spectroscopy imaging methods have been applied to the characterization of furnace-annealed B-implanted Si and self-annealed As-implanted Si. The combination of these techniques allowed us to point out the presence of a coherent precipitation in the SiBx system and the segregation of As at the (111) surfaces of octahedral cavities produced during self-annealing implantation of Si. A simple ideal structural model of the voids with segregated As is proposed.
Electron spectroscopic imaging of dopant precipitation and segregation in silicon
PG Merli;A Migliori;
1991
Abstract
Conventional, high-resolution electron microscopy and electron spectroscopy imaging methods have been applied to the characterization of furnace-annealed B-implanted Si and self-annealed As-implanted Si. The combination of these techniques allowed us to point out the presence of a coherent precipitation in the SiBx system and the segregation of As at the (111) surfaces of octahedral cavities produced during self-annealing implantation of Si. A simple ideal structural model of the voids with segregated As is proposed.File in questo prodotto:
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