We investigated the structural and electrical behavior of Fe implanted and annealed MOVPE grown GaInP layers lattice matched to GaAs substrates, demonstrating that high temperature Fe implantation can give rise to stable semi-insulating layers.
High Resistivity in GaInP/GaAs by High Temperture Fe Ion Implantation
Impellizzeri G;Priolo F;
2005
Abstract
We investigated the structural and electrical behavior of Fe implanted and annealed MOVPE grown GaInP layers lattice matched to GaAs substrates, demonstrating that high temperature Fe implantation can give rise to stable semi-insulating layers.File in questo prodotto:
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