In order to obtain a rapid and non-destructive method for the evaluation of the thickness of polycrystalline thin films of TiO2 or Ga2O3 deposited on alumina substrates, a procedure based on X-ray absorption, and employing X-ray diffraction at glancing angles, was optimized. The results were compared with SEM observations and an agreement within 25% was obtained.
Thickness determination of ceramic thin films by X-ray absorption analysis
Gerbasi R;Porchia M;
1995
Abstract
In order to obtain a rapid and non-destructive method for the evaluation of the thickness of polycrystalline thin films of TiO2 or Ga2O3 deposited on alumina substrates, a procedure based on X-ray absorption, and employing X-ray diffraction at glancing angles, was optimized. The results were compared with SEM observations and an agreement within 25% was obtained.File in questo prodotto:
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