A systematic study of the phase distribution in PbZr0.52Ti0.48O3 films deposited, using a XeCl excimer laser, on two electrodes Si/RuO2 and Si/Ti/RuO2 has been carried out. In order to refine the growth parameters, the substrate temperature was changed in the range 600-700°C at two different values of the laser fluence, 3 and 6 J/cm2. The deposited films were characterized by grazing angle X-ray diffraction (GAD), scanning (SEM) and transmission (TEM) electron microscopy, energy dispersive spectroscopy (EDS) and measurements of the hysteresis loop by a modified Sawyer-Tower circuit. Results showed that at high fluence the perovskite phase decreases as the substrate temperature increases and that the Ti favours the nucleation of the perovskite.
Lead zirconate titanate deposited on RuO2 by pulsed laser ablation
BE Watts;
1997
Abstract
A systematic study of the phase distribution in PbZr0.52Ti0.48O3 films deposited, using a XeCl excimer laser, on two electrodes Si/RuO2 and Si/Ti/RuO2 has been carried out. In order to refine the growth parameters, the substrate temperature was changed in the range 600-700°C at two different values of the laser fluence, 3 and 6 J/cm2. The deposited films were characterized by grazing angle X-ray diffraction (GAD), scanning (SEM) and transmission (TEM) electron microscopy, energy dispersive spectroscopy (EDS) and measurements of the hysteresis loop by a modified Sawyer-Tower circuit. Results showed that at high fluence the perovskite phase decreases as the substrate temperature increases and that the Ti favours the nucleation of the perovskite.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
