In this work we present a process to fabricate low-temperature polysilicon (LTPS) TFTs on polyimide (PI) layers, spin-coated on Si-wafer used as rigid carrier. This process has been then used to fabricate elementary circuits as well as circuits for sensor applications.
Flexible electronics based on polysilicon thin film transistor
M Cuscunà;L Maiolo;F Maita;L Mariucci;D Simeone;A Valletta;A Bearzotti;E Zampetti
2010
Abstract
In this work we present a process to fabricate low-temperature polysilicon (LTPS) TFTs on polyimide (PI) layers, spin-coated on Si-wafer used as rigid carrier. This process has been then used to fabricate elementary circuits as well as circuits for sensor applications.File in questo prodotto:
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