A crystalline all-oxide microelectromechanical system is presented. A suspended SrTiO3(001) cantilever is employed as flexible substrate for the deposition of epitaxial transition-metal oxide films. A strain generator device for oxide films is thus demonstrated, changing the conductivity of an overgrown epitaxial (La,Sr)MnO3 film by bending downward the SrTiO3 element with an AFM tip or a gate voltage bias.
All-Oxide Crystalline Microelectromechanical Systems: Bending the Functionalities of Transition-Metal Oxide Thin Films
Luca Pellegrino;Emilio Bellingeri;Cristina Bernini;
2009
Abstract
A crystalline all-oxide microelectromechanical system is presented. A suspended SrTiO3(001) cantilever is employed as flexible substrate for the deposition of epitaxial transition-metal oxide films. A strain generator device for oxide films is thus demonstrated, changing the conductivity of an overgrown epitaxial (La,Sr)MnO3 film by bending downward the SrTiO3 element with an AFM tip or a gate voltage bias.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
