Epitaxial (Fe,Mn)(3)O-4 thin films are patterned into nanochannels using molybdenum/poly(methyl methacrylate) (PMMA) nanomasks realized by combining local anodic oxidation of Mo and dry etching of PMMA. Nanostructures on the 100 nm scale can be easily fabricated by subsequent wet chemical etching with H3PO4 (see figure). (Fe,Mn)304 nanochannels open the possibility of fabricating spin-polarized nanocircuits for room-temperature spintronics.
(Fe,Mn)3O4 Nanochannels Fabricated by AFM Local-Oxidation Nanolithography using Mo/Poly(methyl methacrylate) Nanomasks
Luca Pellegrino;
2006
Abstract
Epitaxial (Fe,Mn)(3)O-4 thin films are patterned into nanochannels using molybdenum/poly(methyl methacrylate) (PMMA) nanomasks realized by combining local anodic oxidation of Mo and dry etching of PMMA. Nanostructures on the 100 nm scale can be easily fabricated by subsequent wet chemical etching with H3PO4 (see figure). (Fe,Mn)304 nanochannels open the possibility of fabricating spin-polarized nanocircuits for room-temperature spintronics.File in questo prodotto:
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