The paper presents an experimental method useful to characterize a multiport circuit, in particular a MEMS (Micro-Electro-Mechanical System) matrix, using a two-port VNA (Vector Network Analyzer). As example, the method is applied for a four-port circuit (a coupler). The results obtained by using this method and the expected results obtained by simulation are in good agreement.
On-wafer method for experimental characterization of MEMS matrix, using a two-port Vector Network Analyzer
R Marcelli;
2009
Abstract
The paper presents an experimental method useful to characterize a multiport circuit, in particular a MEMS (Micro-Electro-Mechanical System) matrix, using a two-port VNA (Vector Network Analyzer). As example, the method is applied for a four-port circuit (a coupler). The results obtained by using this method and the expected results obtained by simulation are in good agreement.File in questo prodotto:
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