Mesoporous silica (MPS) thin films were characterized by X-ray analysis and electrical measurements to investigate possible correlation between structural order and best response of this kind of sensing material toward RH and alcohols vapours. Both energy dispersive X-ray diffraction and X-ray reflectometry results have been discussed to describe the ordered porosity distribution in the amorphous film. A phenomenological trend of the resistive-type sensors response changing calcination has been found and related to the change in the porosity order of MPS thin film.

X-rays and electrical characterizations of ordered mesostructurated silica thin films

Bearzotti A;Generosi A;
2005

Abstract

Mesoporous silica (MPS) thin films were characterized by X-ray analysis and electrical measurements to investigate possible correlation between structural order and best response of this kind of sensing material toward RH and alcohols vapours. Both energy dispersive X-ray diffraction and X-ray reflectometry results have been discussed to describe the ordered porosity distribution in the amorphous film. A phenomenological trend of the resistive-type sensors response changing calcination has been found and related to the change in the porosity order of MPS thin film.
2005
Istituto per la Microelettronica e Microsistemi - IMM
Istituto di Struttura della Materia - ISM - Sede Roma Tor Vergata
Mesoporosity
Chemical sensor
Energy dispersion
X-ray analysis
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/143443
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