Lead magnesium niobate (Pb(Mg1/3Nb2/3)O3 or PMN) thin films have been deposited on different substrates by Pulsed Laser Deposition (PLD). Film composition was studied by Secondary Ion Mass Spectroscopy (SIMS) and their crystallinity by X-Ray Diffraction (XRD) techniques. Small-signal dielectric constant and loss factor of the films have been measured as a function of temperature and frequency on structures with 3 mm diameter - evaporated Au top electrodes, by using an impedance analyzer. The obtained PMN films have been found polycrystalline and partially oriented, with a certain amount of secondary pyrochlore phases and interface phases which are detrimental for the overall dielectric constant and modifies the relaxor behaviour of the heterostructures. Polarization hysteresis measurements performed at different temperatures below and above the dielectric maximum temperature Tm showed the persistence of polarization above Tm.
Pulsed laser deposition of PMN thin films
Craciun F;Verardi P;Galassi C;
2002
Abstract
Lead magnesium niobate (Pb(Mg1/3Nb2/3)O3 or PMN) thin films have been deposited on different substrates by Pulsed Laser Deposition (PLD). Film composition was studied by Secondary Ion Mass Spectroscopy (SIMS) and their crystallinity by X-Ray Diffraction (XRD) techniques. Small-signal dielectric constant and loss factor of the films have been measured as a function of temperature and frequency on structures with 3 mm diameter - evaporated Au top electrodes, by using an impedance analyzer. The obtained PMN films have been found polycrystalline and partially oriented, with a certain amount of secondary pyrochlore phases and interface phases which are detrimental for the overall dielectric constant and modifies the relaxor behaviour of the heterostructures. Polarization hysteresis measurements performed at different temperatures below and above the dielectric maximum temperature Tm showed the persistence of polarization above Tm.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
