The use of photoacoustic spectroscopy and mid-infrared quantum-cascade lasers (QCLs) for the detection of hexamethyldisilazane (HMDS) is reported. A detection limit of 200 parts in 10(9) is found using a Fabry-Perot QCL operated at 8.4 mu m in pulsed mode and a photoacoustic cell equipped with four electret microphones. The laser multimode spectrum matches the range of the N-H bending absorption band of HMDS. Further improvements to reach lower detection limits are discussed. (c) 2005 Elsevier B.V. All rights reserved.

Quantum cascade laser-based photoacoustic spectroscopy of volatile chemicals: Application to hexamethyldisilazane

Di Franco C;
2006

Abstract

The use of photoacoustic spectroscopy and mid-infrared quantum-cascade lasers (QCLs) for the detection of hexamethyldisilazane (HMDS) is reported. A detection limit of 200 parts in 10(9) is found using a Fabry-Perot QCL operated at 8.4 mu m in pulsed mode and a photoacoustic cell equipped with four electret microphones. The laser multimode spectrum matches the range of the N-H bending absorption band of HMDS. Further improvements to reach lower detection limits are discussed. (c) 2005 Elsevier B.V. All rights reserved.
2006
Istituto di fotonica e nanotecnologie - IFN
INFM
Photoacoustic spectroscopy
Hexamethyldisilazane
Quantum cascade laser
Infrared spectroscopy
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/143656
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