The paper presents the design and yield analysis of a tunable bandpass filter consisting of capacitive coupled distributed MEMS transmission lines. It is used an accurate equivalent circuit based on the electromagnetic MEMS analysis results. The yield analysis takes into account the filter parameter dispersion due to the technological resolution.
Accurate design and yield analysis of tunable distributed MEMS bandpass filter
Bartolucci G;Marcelli R
2006
Abstract
The paper presents the design and yield analysis of a tunable bandpass filter consisting of capacitive coupled distributed MEMS transmission lines. It is used an accurate equivalent circuit based on the electromagnetic MEMS analysis results. The yield analysis takes into account the filter parameter dispersion due to the technological resolution.File in questo prodotto:
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