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The paper presents the design and yield analysis of a tunable bandpass filter consisting of capacitive coupled distributed MEMS transmission lines. It is used an accurate equivalent circuit based on the electromagnetic MEMS analysis results. The yield analysis takes into account the filter parameter dispersion due to the technological resolution.

Accurate design and yield analysis of tunable distributed MEMS bandpass filter

Bartolucci G;Marcelli R
2006

Abstract

The paper presents the design and yield analysis of a tunable bandpass filter consisting of capacitive coupled distributed MEMS transmission lines. It is used an accurate equivalent circuit based on the electromagnetic MEMS analysis results. The yield analysis takes into account the filter parameter dispersion due to the technological resolution.
2006
Istituto per la Microelettronica e Microsistemi - IMM
Inglese
Editors: Werner Wiesbeck and Manfred Thumm
Proceedings of the 2006 German Microwave Conference, GeMIC 2006
2006 German Microwave Conference, GeMIC 2006
5
http://duepublico.uni-duisburg-essen.de/servlets/DerivateServlet/Derivate-14694/Final_Papers/GM0018-F.pdf
Sì, ma tipo non specificato
March 28 - 30, 2006
Karlsruhe (D)
RF MEMS
Microwave Filters
3
none
Simion, S; Bartolucci, G; Marcelli, R
273
info:eu-repo/semantics/conferenceObject
04 Contributo in convegno::04.01 Contributo in Atti di convegno
04.01 Contributo in Atti di convegno
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/144374
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