Abstract -- RF MEMS shunt switches in coplanar waveguide configuration are proposed as variable capacitors by using a voltage control before the bridge collapse as well as the switch full actuation. Several topologies based on the analog and on the digital response of properly combined single devices have been studied in order to get a wide range of variation for the total capacity.

Analog and Digital RF MEMS Variable Capacitors

Romolo Marcelli;Giancarlo Bartolucci
2006

Abstract

Abstract -- RF MEMS shunt switches in coplanar waveguide configuration are proposed as variable capacitors by using a voltage control before the bridge collapse as well as the switch full actuation. Several topologies based on the analog and on the digital response of properly combined single devices have been studied in order to get a wide range of variation for the total capacity.
2006
Istituto per la Microelettronica e Microsistemi - IMM
RF MEMS
Variable Capacitor
Shunt Switch
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/145520
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