Phase shifting interferometry is a preferred technique for high-resolution phase profilemeasurement, but the difficulty in generating the requested shifted pattern has limited the useof the technique to low-noise environment and in case accurate calibration of the phaseshifting device is available. In the present experiment, a sample having one-dimensionalstraight phase boundary is mounted in one arm of an interferometer. One single image of thefringe pattern is recorded, a simple image process is applied generating phase shifted patterns from the original image. Using the appropriate phase shift algorithms, a phase map of thesample is obtained which gives a quantitative measurement of the topographical structure with the resolution of the phase shift method but a single shot recorded pattern.
Profile measurement of a one-dimensional phase boundary sample using a single shot phase-step method
de Angelis M;De Nicola S;Ferraro P;Finizio A;Grilli S;Pierattini G
2005
Abstract
Phase shifting interferometry is a preferred technique for high-resolution phase profilemeasurement, but the difficulty in generating the requested shifted pattern has limited the useof the technique to low-noise environment and in case accurate calibration of the phaseshifting device is available. In the present experiment, a sample having one-dimensionalstraight phase boundary is mounted in one arm of an interferometer. One single image of thefringe pattern is recorded, a simple image process is applied generating phase shifted patterns from the original image. Using the appropriate phase shift algorithms, a phase map of thesample is obtained which gives a quantitative measurement of the topographical structure with the resolution of the phase shift method but a single shot recorded pattern.| File | Dimensione | Formato | |
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Descrizione: Profile measurement of a one-dimensional phase boundary sample using a single shot phase-step method
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