The principle of the digital holography (DH) technique and the potentialities of the method are considered. Experimental results obtained using the DH microscopy technique for characterizing microelectromechanical systems (MEMS) are presented and discussed.
Characterization of microelectromechanical systems by digital holography
De Nicola S;Ferraro P;Finizio A;Coppola G
2006
Abstract
The principle of the digital holography (DH) technique and the potentialities of the method are considered. Experimental results obtained using the DH microscopy technique for characterizing microelectromechanical systems (MEMS) are presented and discussed.File in questo prodotto:
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