Micromachined shunt switches in coplanar waveguide configuration for microwave applications have been realized and characterized. Issues have been addressed about the insertion loss, the reliability and the hysteretic response of the exploited devices. The biasing effect on the actuation voltage has been also investigated.

Technology and Microwave Performances of Micromechanical Shunt Switches

Marcelli R;
2003

Abstract

Micromachined shunt switches in coplanar waveguide configuration for microwave applications have been realized and characterized. Issues have been addressed about the insertion loss, the reliability and the hysteretic response of the exploited devices. The biasing effect on the actuation voltage has been also investigated.
2003
Istituto per la Microelettronica e Microsistemi - IMM
MEMS
switches
microwaves
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/151644
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