Composition and time evolution of the gas plume were investigated during a PLD of SmBaCuO thin films. Optical emission spectroscopy was employed for investigating the laser-induced plasma plume. The mean velocity of ions has been estimated to be slower when the experiment is performed in the presence of a buffer gas. Sm-based thin films produced were morphologically characterized by SEM analysis.
Pulsed Laser Deposition: Analysis and Deposition of SmBaCuO Films
A Di Trolio;A Morone;S Orlando;G P Parisi
1998
Abstract
Composition and time evolution of the gas plume were investigated during a PLD of SmBaCuO thin films. Optical emission spectroscopy was employed for investigating the laser-induced plasma plume. The mean velocity of ions has been estimated to be slower when the experiment is performed in the presence of a buffer gas. Sm-based thin films produced were morphologically characterized by SEM analysis.File in questo prodotto:
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