NbNrMgOrNbN multilayers have been grown by pulsed laser ablation in pure N2 and O2 atmospheres. A Nd:YAG laser, operating at ls532 nm, pulse width 10 ns, and energy density in the range 1-2.5 Jrcm2, was used. The laser beam was focused at an angle of 458 on Nb and Mg metallic targets. A rotating multiple-target holder system allowed in-situ depositions of the multilayers. The samples were grown on SrTiO3 100. substrates 5 cm from the target and held at 5508C NbN. and 2508C MgO.. The morphology and structure of the deposited multilayers were verified by XRD, EDS, as well as electrical measurements.
Pulsed laser ablation of NbN/MgO/NbN multilayers
A Morone;S Orlando;G P Parisi
1997
Abstract
NbNrMgOrNbN multilayers have been grown by pulsed laser ablation in pure N2 and O2 atmospheres. A Nd:YAG laser, operating at ls532 nm, pulse width 10 ns, and energy density in the range 1-2.5 Jrcm2, was used. The laser beam was focused at an angle of 458 on Nb and Mg metallic targets. A rotating multiple-target holder system allowed in-situ depositions of the multilayers. The samples were grown on SrTiO3 100. substrates 5 cm from the target and held at 5508C NbN. and 2508C MgO.. The morphology and structure of the deposited multilayers were verified by XRD, EDS, as well as electrical measurements.File in questo prodotto:
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