We study the fluorescence spectra corresponding to deposition parameters suitable to grow superconducting NbN films of the cubic phase by using a pulsed laser deposition technique in a N2 atmosphere. A Nd-YAG laser beam having k=532 nm focused on either a pure Nb or a NbN targets generated the plasma. Photoemission spectra in the wavelength region [600-630] nm of excited ions within the plume region have been analyzed either for a Nb or a NbN target in the presence of He, Ar, and N 2 gas at different pressure values. The possibility of a reactive process between N 2 and Nb occurring in the plume region is discussed.
Optical emission spectroscopy and growth of NbN films by pulsed laser deposition
A Morone;S Orlando;G Parisi
1996
Abstract
We study the fluorescence spectra corresponding to deposition parameters suitable to grow superconducting NbN films of the cubic phase by using a pulsed laser deposition technique in a N2 atmosphere. A Nd-YAG laser beam having k=532 nm focused on either a pure Nb or a NbN targets generated the plasma. Photoemission spectra in the wavelength region [600-630] nm of excited ions within the plume region have been analyzed either for a Nb or a NbN target in the presence of He, Ar, and N 2 gas at different pressure values. The possibility of a reactive process between N 2 and Nb occurring in the plume region is discussed.File in questo prodotto:
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