We studied the second order optical nonlinearity of aluminum nitride films grown by sputtering onto silicon substrates. The crystalline properties of the films were investigated by x-ray diffraction measurements. Preliminary linear optical characterization of the films was carried out by spectrophotometric optical reflectance measurements at different incidence angles; thus the dispersion laws for both ordinary and extraordinary refractive indices were retrieved. Finally, second harmonic generation measurements in reflection mode were performed at a fixed angle from a fundamental beam provided by a picosecond Ti:sapphire laser system at lambda=800 nm. In the experiments a high blue light conversion efficiency was found for samples 1.5 and 2 mu m thick, and the second order nonlinear coefficient d(33)=11 +/- 1 pm/V was found.
Blue second harmonic generation from aluminum nitride films deposited onto silicon by sputtering technique
Passaseo A;
2006
Abstract
We studied the second order optical nonlinearity of aluminum nitride films grown by sputtering onto silicon substrates. The crystalline properties of the films were investigated by x-ray diffraction measurements. Preliminary linear optical characterization of the films was carried out by spectrophotometric optical reflectance measurements at different incidence angles; thus the dispersion laws for both ordinary and extraordinary refractive indices were retrieved. Finally, second harmonic generation measurements in reflection mode were performed at a fixed angle from a fundamental beam provided by a picosecond Ti:sapphire laser system at lambda=800 nm. In the experiments a high blue light conversion efficiency was found for samples 1.5 and 2 mu m thick, and the second order nonlinear coefficient d(33)=11 +/- 1 pm/V was found.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
