Thin film depositions of metallic silver were performed by the MOCVD (Metal Organic Chemical Vapor Deposition) technique on glass substrate using, as precursors, the two new compounds (1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)(2,2-bipyridine)silver(I), [Ag(hfac)(bipy)] (1), and (1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)(N,N,N,N-tetramethylethylenediamine)silver(I), [Ag(hfac)(tmeda)] (2). Both silver compounds were characterized by single crystal X-ray diffraction measurements, indicating that 1 exists as a dimeric species, and 2 as polymeric chains. The films were analysed by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) revealing, a high crystallinity and fairly good quality with little carbon and oxygen contamination when using the tetramethylethylenediamine derivative
Facile synthesis and characterization of new beta-diketonate silver complexes. single-crystal structures of (1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)(2,2 '-bipyridine)silver(I) and (1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)(N,N,N ',N '-tetramethylethylenediamine)silver(I) and their use as precursors in the MOCVD of silver films
Franco Benetollo;Pierino Zanella;Saulius Kaciulis;Alessio Mezzi
2004
Abstract
Thin film depositions of metallic silver were performed by the MOCVD (Metal Organic Chemical Vapor Deposition) technique on glass substrate using, as precursors, the two new compounds (1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)(2,2-bipyridine)silver(I), [Ag(hfac)(bipy)] (1), and (1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)(N,N,N,N-tetramethylethylenediamine)silver(I), [Ag(hfac)(tmeda)] (2). Both silver compounds were characterized by single crystal X-ray diffraction measurements, indicating that 1 exists as a dimeric species, and 2 as polymeric chains. The films were analysed by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) revealing, a high crystallinity and fairly good quality with little carbon and oxygen contamination when using the tetramethylethylenediamine derivativeI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.