A fabrication process for the construction of micromachined switches has ben designed, developed and tested for producing mechanical test structures and actuated capacitive switches for microwave applications.
Micromachined Switches: Realization and Test
R Marcelli
2003
Abstract
A fabrication process for the construction of micromachined switches has ben designed, developed and tested for producing mechanical test structures and actuated capacitive switches for microwave applications.File in questo prodotto:
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