In this paper, the technology for the realization of micromachined millimeter wave devices on dielectric membranes will be described. Examples of filters and antennas obtained on thin trilayers made by SiO2/Si3N4/SiO2 structures will be given, and their microwave response will be shown.
Fabrication of Millimeter Wave Devices on Dielectric Membranes by Micromachining Technology
R Marcelli;
2002
Abstract
In this paper, the technology for the realization of micromachined millimeter wave devices on dielectric membranes will be described. Examples of filters and antennas obtained on thin trilayers made by SiO2/Si3N4/SiO2 structures will be given, and their microwave response will be shown.File in questo prodotto:
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