Digitaly holography is shown to be an efficient technique for 3D shape measurements of MEMS with submicron accuracy. Both phase and amplitude images can be numerically reconstruceted to obtain the 3D defoemation map of the microelectronic structure under test. The principle of the method is described and several examples of numerical reconstruction are shown
Digital Holography for characterization and testing of MEMS structures
2002
Abstract
Digitaly holography is shown to be an efficient technique for 3D shape measurements of MEMS with submicron accuracy. Both phase and amplitude images can be numerically reconstruceted to obtain the 3D defoemation map of the microelectronic structure under test. The principle of the method is described and several examples of numerical reconstruction are shownFile in questo prodotto:
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