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In the last years there was an increasing interest in micromachined RF switches, mainly in the communication and space industries. This article describes a fabrication process used for the development of electrostatically actuated MEMS RF switches operating in the 2 - 40 GHz range. Results of the RF characteristic measurements of single switches are presented and possible improvements are discussed.

MEMS Technology for RF Switches

R Marcelli
2004

Abstract

In the last years there was an increasing interest in micromachined RF switches, mainly in the communication and space industries. This article describes a fabrication process used for the development of electrostatically actuated MEMS RF switches operating in the 2 - 40 GHz range. Results of the RF characteristic measurements of single switches are presented and possible improvements are discussed.
2004
Istituto per la Microelettronica e Microsistemi - IMM
Inglese
C. Di Natale et al.
Sensors and Microsystems: Proceedings of the 8th Italian Conference
392
400
9
981-238-747-1
http://www.worldscientific.com/doi/abs/10.1142/9789812702944_0062?prevSearch=[Contrib%3A+Marcelli]+and+[PubIdSpan%3A+9789812387479]&searchHistoryKey=
World Scientific Publishing Co. Pte. Ltd.
Singapore
SINGAPORE
Sì, ma tipo non specificato
RF MEMS
Micromachning
1
02 Contributo in Volume::02.01 Contributo in volume (Capitolo o Saggio)
268
none
F. Giacomozzi; L. Lorenzelli; B. Margesin; G. Turco; R. Marcelli
info:eu-repo/semantics/bookPart
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/16464
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