Morphology of MEMS structures subjected to static deformations and thermal loading are investigated by digital microscope holography
Evaluation of residual stress in MEMS structures by means of digital holography
De Nicola S;Coppola G;Finizio A;Iodice M;Pierattini G
2003
Abstract
Morphology of MEMS structures subjected to static deformations and thermal loading are investigated by digital microscope holographyFile in questo prodotto:
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