RF MEMS shunt switche in coplanar waveguide configuration are proposed as variable capacitors by using a voltage control before the bridge collapse as well as the switch actuation.

Analog and Digital Control in the Capacitance of RF MEMS Switches

Romolo Marcelli;Giancarlo Bartolucci
2007

Abstract

RF MEMS shunt switche in coplanar waveguide configuration are proposed as variable capacitors by using a voltage control before the bridge collapse as well as the switch actuation.
2007
Istituto per la Microelettronica e Microsistemi - IMM
978-973-27-1524-6
RF MEMS
Variable Capacitance
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/16484
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