RF MEMS series and shunt switches in coplanar waveguide configuration have been tested to check their reliability in terms of technological yield, neumber of cycles and total time during which they are actuated. Power handling has beeb also considered, up to 5 watt.

Reliability and Power Handling Issues in Ohmic Series and Shunt Capacitive RF MEMS Switches for Space Applications

Romolo Marcelli;
2007

Abstract

RF MEMS series and shunt switches in coplanar waveguide configuration have been tested to check their reliability in terms of technological yield, neumber of cycles and total time during which they are actuated. Power handling has beeb also considered, up to 5 watt.
2007
Istituto per la Microelettronica e Microsistemi - IMM
978-973-27-1524-6
RF MEMS
Reliability
Power Handling
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/16488
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