In this paper, two matched microstrip line configurations for the excitation of magnetostatic wave resonators (SER) have been studied for optimizing the SER performances. The first transducer was designed on a bulk silicon substrate, and the second one suspended on a micromachined membrane, to be realized by means of wet anisotropic etching. These configurations were simulated by Microwave Office.
Modeling of Matched Microstrip Lines on Bulk and Micromachined Structures
Marcelli R;
2003
Abstract
In this paper, two matched microstrip line configurations for the excitation of magnetostatic wave resonators (SER) have been studied for optimizing the SER performances. The first transducer was designed on a bulk silicon substrate, and the second one suspended on a micromachined membrane, to be realized by means of wet anisotropic etching. These configurations were simulated by Microwave Office.File in questo prodotto:
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