The effectiveness of some different kinds of surface coatings on austenitic stainless steel samples is discussed on the basis of their effects on the outgassing flowrates in vacuum and at high temperature. Special attention is given to the reduction of molecular hydrogen diffusion from the bulk. The effects of TiN thin films and oxide layer were studied through total and partial pressure measurements in a known-conductance system in which the dynamic method is applied; gas analysis was performed by a mass spectrometer, using the TDS technique (Thermal Desorption Spectroscopy). The results show that TiN thin films can produce a drastic reduction of the total outgassing flowrate from stainless steel (more than 50%); in the particular case of the oxide layer there is even a 70% reduction in comparison with the case of simply polished stainless steel. As far as hydrogen outgassing flowrate, the decrease is equal to about 80% in the case of TiN thin films and to 90% in the case of oxide coating.

Thermal desorption from stailess steel sample coated with TiN and oxide layers

2001

Abstract

The effectiveness of some different kinds of surface coatings on austenitic stainless steel samples is discussed on the basis of their effects on the outgassing flowrates in vacuum and at high temperature. Special attention is given to the reduction of molecular hydrogen diffusion from the bulk. The effects of TiN thin films and oxide layer were studied through total and partial pressure measurements in a known-conductance system in which the dynamic method is applied; gas analysis was performed by a mass spectrometer, using the TDS technique (Thermal Desorption Spectroscopy). The results show that TiN thin films can produce a drastic reduction of the total outgassing flowrate from stainless steel (more than 50%); in the particular case of the oxide layer there is even a 70% reduction in comparison with the case of simply polished stainless steel. As far as hydrogen outgassing flowrate, the decrease is equal to about 80% in the case of TiN thin films and to 90% in the case of oxide coating.
2001
IMGC - Istituto di metrologia "Gustavo Colonnetti"
62
7
14
Vuoto
Desorbimento termico
Film sottili
Diffusione idrogeno
Scopo di tale lavoro è stato quello di evidenziare gli effetti di film sottili utilizzati come rivestimento delle pareti interne (in acciaio inossidabile) di un impianto da vuoto. L’impiego di tali rivestimenti può ridurre gli strati di gas adsorbito sulle pareti stesse quando queste vengono a contatto con l’aria a pressione atmosferica (ad esempio, durante l’apertura dell’impianto), il che comporta una diminuzione del rilascio di gas una volta riavviato il pompaggio (e, quindi, il raggiungimento di pressioni ultime minori ed in minor tempo). Inoltre, i film sottili possono agire come “barriera” per l’idrogeno molecolare che, originato dal vapor acqueo all’esterno dell’impianto, diffonde attraverso l’acciaio andando a costituire gran parte della pressione residua nell’impianto da vuoto.
0
info:eu-repo/semantics/article
262
G. Raiteri .; A.Calcateli .
01 Contributo su Rivista::01.01 Articolo in rivista
none
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/169117
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