A study for the scaling up of a XeCl long pulse laser working in auto prepulse is presented. We summarize the requirements for obtaining extended discharge stability in an excimer laser system. Computer modeling on two laser prototypes and experimental results on a small scale device and first outputs on a scaled up version, clarify the fundamental parameters for the project of a final laser system getting 0.5 J at about 400 ns.
Auto prepulse operation of a XeCl scaled up prototype: Modelling and achievements
1993
Abstract
A study for the scaling up of a XeCl long pulse laser working in auto prepulse is presented. We summarize the requirements for obtaining extended discharge stability in an excimer laser system. Computer modeling on two laser prototypes and experimental results on a small scale device and first outputs on a scaled up version, clarify the fundamental parameters for the project of a final laser system getting 0.5 J at about 400 ns.File in questo prodotto:
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