Excimer laser-induced photochemistry of dimetylzinc (DMZn) and diethylzinc (DEZn) has been investigated by multiphoton ionization time-of-flight mass spectroscopy. After the results achieved, DEZn was chosen as precursor compound for zinc film photodeposition. The organometallic was photolyzed by a focussed KrF excimer laser beam perpendicularly impinging onto a quartz substrate. Localized zinc deposition with thicknesses in the range (300curly logical or3000) Å has been obtained and the deposition process has been investigated by monitoring the time evolution of the fraction of a He-Ne laser beam transmitted by the growing zinc film. © 1989 Società Italiana di Fisica.
Excimer laser photolysis of Zn dialkyls for Zn deposition
Larciprete R;
1989
Abstract
Excimer laser-induced photochemistry of dimetylzinc (DMZn) and diethylzinc (DEZn) has been investigated by multiphoton ionization time-of-flight mass spectroscopy. After the results achieved, DEZn was chosen as precursor compound for zinc film photodeposition. The organometallic was photolyzed by a focussed KrF excimer laser beam perpendicularly impinging onto a quartz substrate. Localized zinc deposition with thicknesses in the range (300curly logical or3000) Å has been obtained and the deposition process has been investigated by monitoring the time evolution of the fraction of a He-Ne laser beam transmitted by the growing zinc film. © 1989 Società Italiana di Fisica.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
