Laser heating can be used to fully densify selected areas of a partially densified sol-gel film deposited onto a glass substrate, thus substituting the conventional heat treatment in an oven. Here the topographic and optical characteristics of strip waveguides produced in a SiO2-TiO2 film by direct writing with a focused CO2 laser are presented, and the critical parameters of the process discussed.

Laser writing of optical waveguides in sol-gel films

Pelli;Stefano;Righini;
1994

Abstract

Laser heating can be used to fully densify selected areas of a partially densified sol-gel film deposited onto a glass substrate, thus substituting the conventional heat treatment in an oven. Here the topographic and optical characteristics of strip waveguides produced in a SiO2-TiO2 film by direct writing with a focused CO2 laser are presented, and the critical parameters of the process discussed.
1994
Inglese
Nanofabrication Technologies and Device Integration
2213
58
63
0819415170
http://www.scopus.com/inward/record.url?eid=2-s2.0-0028737011&partnerID=40&md5=9fafcb4f96b1b63c069337a0016d7559
Films
Heating
Optical waveguides
Laser writing
Sol gel films
Strip waveguides
Laser applications
cited By (since 1996)5; Conference of org.apache.xalan.xsltc.dom.DOMAdapter@220fb509 ; Conference Date: org.apache.xalan.xsltc.dom.DOMAdapter@35367357 Through org.apache.xalan.xsltc.dom.DOMAdapter@9ce700c; Conference Code:22047
12
none
Pelli, Stefano; Pelli, Stefano; Righini, Giancarlo; Giancarlo, C; Verciani, ; Alessandro, ; Guglielmi, ; Massimo, ; Martucci, ; Alessandro, ; Scaglion...espandi
273
info:eu-repo/semantics/conferenceObject
04 Contributo in convegno::04.01 Contributo in Atti di convegno
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/19961
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