In this paper we give an overview of the results obtained after benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics NEMO. After a call within the NEMO network six different partners decided to organize a round robin. In this paper we will give an overview of all the experimental values obtained in the 6 different round robins, then we will comment on these results by explaining the measurement differences and the uncertainties for all measurands.

Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics NEMO

Pelli;
2006

Abstract

In this paper we give an overview of the results obtained after benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics NEMO. After a call within the NEMO network six different partners decided to organize a round robin. In this paper we will give an overview of all the experimental values obtained in the 6 different round robins, then we will comment on these results by explaining the measurement differences and the uncertainties for all measurands.
2006
Inglese
Optical Micro- and Nanometrology in Microsystems Technology
6188
http://www.scopus.com/inward/record.url?eid=2-s2.0-33746689829&partnerID=40&md5=fa2017d88e7cc46ba3b6ad2a802cc79b
Benchmarking
Image quality
Measurement theory
Optical properties
Measurement techniques
Optical characterization
Optical quality
Round robins
Microoptics
cited By (since 1996)0; Conference of org.apache.xalan.xsltc.dom.DOMAdapter@21873c37 ; Conference Date: org.apache.xalan.xsltc.dom.DOMAdapter@35825013 Through org.apache.xalan.xsltc.dom.DOMAdapter@7e572ad6; Conference Code:67966
1
none
Ottevaere; H.a;Destouches; N.b;Gorecki; C.c;Kossek; T.d;Pelli; S.e;Piramidowicz; R.f;Szcepanski; P.f;Kujawinska; M.g
273
info:eu-repo/semantics/conferenceObject
04 Contributo in convegno::04.01 Contributo in Atti di convegno
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/19988
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 0
  • ???jsp.display-item.citation.isi??? ND
social impact