Superconductive thin films of Y-Ba-Cu-O have been grown in situ by r.f. magnetron sputtering from a single stoichiometric target on Al2O3 substrates. Zero-resistivity temperatures as high as 73 K have been achieved. X-ray and EDS analyses have been performed on the samples. The dependence of film features on deposition conditions is also discussed.
INSITU SUPERCONDUCTING Y-BA-CU-O THIN-FILMS BY SINGLE-TARGET RF MAGNETRON SPUTTERING
ANDREONE A;GRANOZIO;TAFURI F;PEPE;
1991
Abstract
Superconductive thin films of Y-Ba-Cu-O have been grown in situ by r.f. magnetron sputtering from a single stoichiometric target on Al2O3 substrates. Zero-resistivity temperatures as high as 73 K have been achieved. X-ray and EDS analyses have been performed on the samples. The dependence of film features on deposition conditions is also discussed.File in questo prodotto:
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