The 14N(?,p)17O nuclear reaction cross-section was measured in the energy range 4.9-6.1 MeV at the laboratory angle ? = 172° in order to apply ion beam analysis to the detection of N in metal oxynitride layers. Comparison between the new calculation and data in literature was performed, highlighting important discrepancies between the new results and old cross-section data. Application of the new calculations to a standard TiN film suggests improved accuracy for the data in the present work. © 2005 Elsevier B.V. All rights reserved.
14N(?,p)17O nuclear reaction cross-section at 4.9-6.1 MeV
Vomiero;
2005
Abstract
The 14N(?,p)17O nuclear reaction cross-section was measured in the energy range 4.9-6.1 MeV at the laboratory angle ? = 172° in order to apply ion beam analysis to the detection of N in metal oxynitride layers. Comparison between the new calculation and data in literature was performed, highlighting important discrepancies between the new results and old cross-section data. Application of the new calculations to a standard TiN film suggests improved accuracy for the data in the present work. © 2005 Elsevier B.V. All rights reserved.File in questo prodotto:
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