The fabrication of Meander and S Line Inductors on Thin Dielectric Membranes Manufactured by Anisotropic and Isotropic Etching of Silicon is presented together with microwave measurements
Meander and S Line Inductors on Thin Dielectric Membranes Manufactured by Anisotropic and Isotropic Etching of Silicon
R Marcelli
1998
Abstract
The fabrication of Meander and S Line Inductors on Thin Dielectric Membranes Manufactured by Anisotropic and Isotropic Etching of Silicon is presented together with microwave measurementsFile in questo prodotto:
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