Synchrotron white beam topography has been applied to study defects in 6H-SiC platelets grown by the Lely method. In addition, high resolution X-ray diffraction, chemical etching, capacitance-voltage and photoluminescence measurements were carried out to confirm and complement the topography results. The occurrence of structural defects such as various misorientations, dislocations, stacking faults and precipitates are classified into grown-in and post-growth defects. The results are related to the assumed growth process of the differently shaped platelets.
Nature and occurrence of defects in 6H-SiC Lely crystals
Milita S;
2001
Abstract
Synchrotron white beam topography has been applied to study defects in 6H-SiC platelets grown by the Lely method. In addition, high resolution X-ray diffraction, chemical etching, capacitance-voltage and photoluminescence measurements were carried out to confirm and complement the topography results. The occurrence of structural defects such as various misorientations, dislocations, stacking faults and precipitates are classified into grown-in and post-growth defects. The results are related to the assumed growth process of the differently shaped platelets.File in questo prodotto:
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